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Induction Heating Of Thin Films, Paul L. Bergstrom, Melissa L. Trombley
Induction Heating Of Thin Films, Paul L. Bergstrom, Melissa L. Trombley
Paul Bergstrom
A method of performing regional heating of a system having a substrate. The method may include applying a thin film to the system, and controllably energizing a coil positioned near the thin film. The energized coils thereby generate a magnetic flux. The method further includes inducing a current in the thin film with the magnetic flux thereby heating the system.