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Wavelet Analysis Of Periodic Error In Heterodyne Interferometry, Chao Lu

Theses and Dissertations

Heterodyne displacement measuring interferometry provides important metrology for applications requiring high resolution and accuracy. Heterodyne Michelson interferometers use a two-frequency laser source and separate the two optical frequencies into one fixed length and one variable length path via polarization. Ideally these two beams are linearly polarized and orthogonal so that only one frequency is directed toward each path. An interference signal is obtained by recombining the light from the two paths; this results in a measurement signal at the heterodyne (split) frequency of the laser source. This measurement signal is compared to the optical reference signal. Motion in the measurement …