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Missouri University of Science and Technology
Confocal microscopy<br />Laser beam cutting<br />Lasers -- Industrial applications<br />Microtechnology<br />Optical measurements
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On-Line Depth Measurement Of Micro-Scale Laser Drilled Holes, Rock Allen Powell
On-Line Depth Measurement Of Micro-Scale Laser Drilled Holes, Rock Allen Powell
Masters Theses
"A micron-precision micro-hole depth detection scheme has been developed which utilizes a confocal structure and a photomultiplier tube as a photodetector. This scheme is experimentally confirmed to posses an accuracy of greater than 95% for micro-holes on the order of one-hundred microns in diameter and tens of microns in depth and could be easily be integrated for the control of industrial and research oriented laser micro-machining process"--Abstract, page iii.