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Full-Text Articles in Engineering
53rd Rocky Mountain Conference On Analytical Chemistry
53rd Rocky Mountain Conference On Analytical Chemistry
Rocky Mountain Conference on Magnetic Resonance
Final program, abstracts, and information about the 53rd annual meeting of the Rocky Mountain Conference on Analytical Chemistry, co-endorsed by the Colorado Section of the American Chemical Society and the Society for Applied Spectroscopy. Held in Snowmass, Colorado, July 24-28, 2011.
High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators With Piezoresistive Readout, Amir Rahafrooz
High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators With Piezoresistive Readout, Amir Rahafrooz
Electronic Theses and Dissertations
Over the past decades there has been a great deal of research on developing high frequency micromechanical resonators. As the two most common and conventional MEMS resonators, piezoelectric and electrostatic resonators have been at the center of attention despite having some drawbacks. Piezoelectric resonators provide low impedances that make them compatible with other low impedance electronic components, however they have low quality factors and complicated fabrication processes. In case of electrostatic resonators, they have higher quality factors but the need for smaller transductions gaps complicates their fabrication process and causes squeezed film damping in Air. In addition, the operation of …