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Materials Science and Engineering

2008

Electronic Theses and Dissertations

Characterization

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Quantitative Thickness Mapping In High-Angle Annular Dark-Field (Haadf) Scanning Transmission Electron Microscopy (Stem), Haritha Nukala Jan 2008

Quantitative Thickness Mapping In High-Angle Annular Dark-Field (Haadf) Scanning Transmission Electron Microscopy (Stem), Haritha Nukala

Electronic Theses and Dissertations

Only a few methods are currently available for the measurement of sample thicknesses in Transmission Electron Microscopy (TEM). These methods, Convergent-Beam Electron Diffraction (CBED) and thickness mapping in Energy-Filtered TEM (EFTEM), are either elaborate or complex. In this present work, I have investigated and come up with a simple straight-forward method to measure the local thickness of a TEM sample with the atomic number (Z-contrast) imaging using High-Angle Annular Dark Field (HAADF) Scanning Transmission Electron Microscopy (STEM). HAADF STEM shows atomic number contrast for high scattering angles of the electrons, owing to predominant electron scattering at the potential of the …