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Deposition Of Tantalum On Steel By Sputtering, Bhavin Shah
Deposition Of Tantalum On Steel By Sputtering, Bhavin Shah
Theses
Recent interest in tantalum deposition comes from two different applications. One is in microelectronics where thin tantalum films (< 1 µm) are used as diffusion barrier layers for copper interconnects. The other involves its application as a material for corrosion and wear resistant coating on surfaces that are subjected to high stresses and harsh chemical and erosive environments.
This thesis is a part of the investigation done at the Ion Beam and Thin Film Research Laboratory at NJIT to study the deposition conditions and properties of tantalum thin films. It includes the design and construction of Planar D.C. Magnetron Sputtering System and Cylindrical D.C. Magnetron Sputtering System for deposition on the planar and cylindrical surfaces of steel, respectively. The electrical characteristics of the cylindrical system were tested in a range of pressures and conditions for initiation and maintaining of …