Engineering Commons^™

Growth And Characterization Of 2d Layered Materials, Algene Fryer Ii

USF Tampa Graduate Theses and Dissertations

2D layered materials are becoming an important area of research due to their exceptional electrical and optical properties. Specifically, 2D layered monochalcogenides are known for their high carrier motilities, whereas layered metal halides have been shown to have noteworthy photoresponsivity. Despite the assortment of 2D layered materials, the search for reliable and scalable synthesis methods is still a challenge in this family of materials. Often a certain growth technique will compromise a desirable trait needed for further fabrication, such as the quality of the crystal or its coverage on a substrate. In this study, two growth techniques that incorporate changeable …

Stress-Strain Management Of Heteroepitaxial Polycrystalline Silicon Carbide Films, Christopher William Locke

USF Tampa Graduate Theses and Dissertations

Silicon carbide (SiC) is one of the hardest known materials and is also, by good fortune, a wide bandgap semiconductor. While the application of SiC for high-temperature and high-power electronics is fairly well known, its utility as a highly robust, chemically-inert material for microelectrical mechanical systems (MEMS) is only beginning to be well recognized. SiC can be grown on both native SiC substrates or on Si using heteroepitaxial growth methods which affords the possibility to use Si micromachining methods to fabricate advanced SiC MEMS devices.

The control of film stress in heteroepitaxial silicon carbide films grown on polysilicon-on-oxide substrates has …