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Restoration And Modification Of A Sputter Tool For The Deposition Of A Zno Guiding Layer Via Rf Sputtering, Matthew Watson
Restoration And Modification Of A Sputter Tool For The Deposition Of A Zno Guiding Layer Via Rf Sputtering, Matthew Watson
USF Tampa Graduate Theses and Dissertations
In this thesis, a novel sputter tool was restored and modified to deposit a ZnO film for future applications as a guiding layer on a surface acoustic wave (SAW) device. Some restorations and modifications included a water chiller being sized and added to the tool, leak checks to establish an ultra-high vacuum of 10-6 Torr, then finally heat lamps for temperature control were installed. Once modified, one of the preexisting magnetrons was utilized to deposit a ZnO via RF sputtering onto a quartz substrate. The layer was characterized via energy-dispersive X-ray spectroscopy which showed the existence of Zn on the …