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The Feasibility Of Micromachined Dynamic Resonant Beam Coriolis True Mass Flow Meter, Sang Hwui Lee

Dissertations

The technological advances of micro-electro-mechanical systems (MEMS) in the past two decades have been remarkable for innovations in microfluidic systems as well as automotive applications such as pressure sensors and accelerometers. MEMS flow sensing has emerged as a field of interest in microfluidics, with a variety of sensing methods being miniaturized, such as thermal anemometry, ultrasonic sensing and flow measurement based on the Coriolis effect. Coriolis sensing is particularly attractive since, unlike most other methods which provide volumetric flow information, Coriolis sensing is capable of providing a direct, true mass flow measurement. Because of this advantage, Coriolis flow sensing has …