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Mechanisms Of Layer-Transfer Related To Silicon-On-Insulator Structures, Bo Chen

Dissertations

The objective of this dissertation was to study the mechanisms that affect an efficient hydrogenation process in silicon and to validate a hypothesis concerning the hydrogenation mechanism of pre-implanted silicon wafers under hydrogen-plasma processing. These studies are related to a general process. A trapping layer for hydrogen was introduced by ion beam implantation into the silicon wafer. Next, this wafer was hydrogenated using a hydrogen plasma. It was hypothesized that the trapping layer acts as a getterer for the hydrogen diffusing into the silicon wafer. It was found that a large amount of hydrogen could be absorbed in the trapping …