Engineering Commons^™

Characterization Of Alpha And Beta Phases Of Tantalum Coatings, Anto Yohannan

Theses

Sputtered tantalum forms two phases - α and β. The α and β phases have distinctly different crystalline structures and properties. The structure and the causes of formation of the β phase are still being studied by researchers. This is a study to distinguish and characterize these two phases. Samples from Bennet Labs and NJIT were characterized using techniques such as SEM, EDX, XRF, XRD, TEM and XAFS. Samples deposited at NJIT were used for an experimental study on the conditions favoring the formation of the phases, by depositing tantalum on heated steel and silicon substrates, additionally TEM analysis was …