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Development Of An Integrated Photonic Sensor For Monitoring Hazardous Organics, Dianhong Luo
Development Of An Integrated Photonic Sensor For Monitoring Hazardous Organics, Dianhong Luo
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In this study, an integrated photonic sensor has been designed and fabricated for the purpose of monitoring hazardous organics in the environment. The operation of the sensor is based on the principles of the Mach-Zehnder interferometry. The sensor consists of a patterned waveguide structure made of phosphosilicate core and silica cladding. LPCVD processes were developed to produce undoped cladding and doped core silicon dioxide films. Diethylsilane (DES), Trimethylphosphite (TMP) and oxygen were used as the precursors for the deposition process. The effects of the O2/DES ratio and deposition temperature on the properties Of SiO2 films were investigated. …