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Influence Of Substrate Stage Temperature And Rotation Rate On The Magneto-Optical Quality Of Rf-Sputtered Bi2.1dy0.9fe3.9ga1.1o12 Garnet Thin Films, Mohammad E. Alam, Mikhail Vasiliev, Kamal Alameh
Influence Of Substrate Stage Temperature And Rotation Rate On The Magneto-Optical Quality Of Rf-Sputtered Bi2.1dy0.9fe3.9ga1.1o12 Garnet Thin Films, Mohammad E. Alam, Mikhail Vasiliev, Kamal Alameh
Research outputs 2014 to 2021
Highly bismuth-substituted iron garnet thin films are prepared on quartz substrates by using a radio frequency (RF) magnetron sputtering technique. We study the factors (process parameters associated with the RF magnetron sputter deposition technique) affecting the magneto-optical (MO) properties of ferrite garnet films of composition Bi2.1Dy0.9Fe3.9Ga1.1O12. All films show high MO response across the visible range of wavelengths after being annealed. In particular, the effects of substrate stage temperature and rotation rate on the various properties of films are studied. Experimental results reveal that the characteristics of garnet films of this type can be tuned and optimized for use in …