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Deposition Of Nanoparticles Or Thin Films Via Magnetron Sputtering Towards Graphene Surface Functionalization And Device Fabrication, Bridget Jul Larson

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Graphene, a 2-dimensional single layer of carbon, has high carrier mobility, strength and electrical conductivity. Due to the absence of a band gap and chemical reactivity, pristine graphene has less competitiveness in semiconductors and sensors. Functionalizing graphene is imperative in the development of advanced applications. Among various wet chemical or physical vapor deposition, magnetron sputtering is cost-effective, minimum maintenance, user-friendly, and can be used to rapidly deposit nano-particulates or thin films with less contaminations on any substrates surface. This study is to investigate the morphology evolution of the deposited films using magnetron sputtering and to find appropriate conditions for nanoparticulate …