Engineering Commons^™

Low Temperature Synthesis And Characterization Of Lpcvd Silicon Dioxide Films Using Diethylsilane, Chakravarthy Srinivasa Gorthy

Theses

Diethylsilane (DES) has been used as a precursor to produce silicon dioxide films by low pressure chemical vapor deposition. These films were synthesized in the temperature range of 350 to 475°C thus allowing the use of the material as an intermetal dielectric or as a top layer passivation coating in microelectronic devices. In that process, the growth rate was observed to follow an Arrhenius behavior yielding an activation energy of 10 kcal/mol. The growth rate was also observed to increase with higher pressure and to vary as a function of the square root of the DES flow rate and O …

Expert System For Preventive Maintenance The Aluminum Extrusion Press And Related Equipment, E-Ping Lin

Theses

ESPM is an Expert System for Preventive Maintenance that provides the framework for application-specific equipment maintenance tools. The expert system for preventive maintenance and diagnosis was developed for the Aluminum Extrusion Press and Related Equipment. The system is built in VP-Expert and is implemented on a personal computer.

The expert system includes many characteristics of an expert system cell because it can be expanded easily by adding new information to its knowledge base or by changing the existing information. The expert system can be connected directly with a PC system through a VP-Expert software package and can interact with C …