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On The Pulsed Laser Ablation Of Metals And Semiconductors, Todd A. Van Woerkom

Theses and Dissertations

This dissertation covers pulsed laser ablation of Al, Si, Ti, Ge, and InSb, with pulse durations from tens of picosecond to hundreds of microseconds, fluences from ones of J/cm² to over 10,000 J/cm², and in ambient air and vacuum. A set of non-dimensional scaling factors was created to interpret the data relative to the laser and material parameters, and it was found that pulse durations shorter than a critical timescale formed craters much larger than the thermal diffusion length, and longer pulse durations created holes much shallower than the thermal diffusion length. Low transverse order Gaussian beams …