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Properties Of Ruthenium Oxide Coatings, Roger M. Hawk, Kamesh V. Gadepally, David N. Patangia
Properties Of Ruthenium Oxide Coatings, Roger M. Hawk, Kamesh V. Gadepally, David N. Patangia
Journal of the Arkansas Academy of Science
Ruthenium oxide coatings have been deposited on titanium substrates using a flood coating process. These films were heat treated for varying times and temperatures. The resulting films subsequently were characterized by performing resistivity and SEM analyses. Resistivity of the ruthenium oxide coating was found to be extremely dependent upon the firing temperature. Effect of the process conditions and formulations of the coatings on the morphology with respect to their electrical characteristics is presented. Capacitors were fabricated using plates coated with ruthenium oxide coatings. Capacitance versus heat treatment temperatures are discussed and at one firing temperature (480'C), the capacitance was 50 …