Engineering Commons^™

Selected Applications Of Silicon Nanopillar Arrays., Behnam Kheyraddini Mousavi

Electrical and Computer Engineering ETDs

Interaction of optical waves with nanostructures made of various material systems has been the subject of intensive research for many years. These researches have been mainly driven by the need to make smaller optical devices and exploiting the functionalities offered by light-matter interaction in nanoscale. Majority of the nanostructures are fabricated using electron beam (e-beam) lithography that is slow and expensive. As such alternative methods have been developed to enable nanoscale fabrication faster and less expensive. Among these interferometric lithography (IL) is a relatively simple method for quick fabrication of nanostructures. As IL method generates periodic patterns, exploring the potential …