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Electronic Devices and Semiconductor Manufacturing

Air Force Institute of Technology

Theses/Dissertations

Capacitors

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A Mems Multi-Cantilever Variable Capacitor On Metamaterial, Luke A. Rederus Feb 2009

A Mems Multi-Cantilever Variable Capacitor On Metamaterial, Luke A. Rederus

Theses and Dissertations

Negative refractive index materials are an example of metamaterials that are becoming increasingly popular. Research into these metamaterials could possibly be the first steps toward bending electromagnetic radiation (i.e., microwaves, light, etc.) around an object or person. Split ring resonators (SRR) are classified as metamaterials that create an artificial magnetic response from materials with no inherent magnetic properties. Once fabricated, an SRR has a specific resonant frequency due to its permanent geometry. This research introduces a new concept of using a variable capacitive micro- electro-mechanical system (MEMS) device located at the gap of an SRR to mechanically alter the capacitance …