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Influence Of Materials And Design Parameters On Zinc Oxide Surface Acoustic Devices, Samuel B. Dewhitt

Theses and Dissertations

This thesis presents research into Zinc Oxide (ZnO) based resonators to include Width Extensional Mode (WEM), Length Extensional Mode (LEM), and Surface Acoustic Wave (SAW) devices. The design and operation of ZnO based SAW devices are investigated further to characterize design parameters and operating modes. Their design, fabrication, and results are discussed in detail. SAW device testing in conjunction with X-Ray Diffractometry (XRD) and Atomic Force Microscopy (AFM) are utilized to characterize ZnO and its deposition parameters on a variety of different substrates and interlayers, with different deposition temperatures and annealing parameters. These substrates include silicon, silicon oxide-on-silicon, and sapphire …