Engineering Commons^™

Cantilever Beam Microactuators With Electrothermal And Electrostatic Drive, Murat M. Okyar

Dissertations

Microfabrication provides a powerful tool for batch processing and miniaturization of mechanical systems into dimensional domain not accessible easily by conventional machining. CMOS IC process compatible design is definitely a big plus because of tremendous know-how in IC technologies, commercially available standard IC processes for a reasonable price, and future integration of microma-chined mechanical systems and integrated circuits. Magnetically, electrostatically and thermally driven microactuators have been reported previously. These actuators have applications in many fields from optics to robotics and biomedical engineering.

At NJIT cleanroom, mono or multimorph microactuators have been fabricated using CMOS compatible process. In design and fabrication …

Single-Axis Agonistic Motion Control System With Electro-Magnetic Actuators, Alexander Rokhvarg

Theses

A novel single-axis motion control system using solenoid electromagnet actuators is built and successfully controlled using a non-linear real-time control algorithm. Procedures for defining and modeling the electromagnetic actuator are established and implemented. Discrete-time nonlinear control law with global asymptotic stability and zero steady-state error is designed and numerically optimized. Stable operation with small-signal 0dB crossover frequency of 370 Rad/sec and positioning RMS steady-state error of better than 4 micron is achieved. Time domain parameters are verified on a working prototype. A step reference response positioning a 0.35 Kg mass payload over 1 cm travel in under 30 milliseconds is …