Engineering Commons^™

Determining Process Latitude With Electrically Measurable Test Structures, Jonathan Littlehale

Theses

Collection of linewidth data is an important part of photoresist characterization. Linewidth data are usually collected by optical measurements or scanning electron microscopy. Both of these techniques are tedious and time-consuming. In this work, electrically measurable test structures are used to collect linewidth data. These structures use a measured sheet resistance, a known length of conducting material, and the measured resistance of the structure to determine the linewidth. The benefits of using these structures include completely automated data collection and the ability to collect statistically significant amounts of data. This allows the use of existing statistical analysis software to analyze …