Engineering Commons^™

Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam

Electronic Theses and Dissertations

Advancements in microscale actuating technologies has substantially expanded the possibilities of interacting with the surrounding environment. Microstructures that deflect in response to mechanical forces are one of the largest application areas of microelectromechanical systems (MEMS). MEMS devices, functioning as sensors, actuators, and support structures, find applications in inertial sensors, pressure sensors, chemical sensors, and robotics, among others. Driven by the critical role of catalytic membrane reactors, this dissertation aims to evaluate enzyme activity on polymeric membranes and explore how fabrication methods from the field of Electrical and Computer Engineering (ECE) can incorporate sensing and actuation into these porous surfaces. Toward …

Spice Modeling Of Biosensing Field-Effect Transistor, Alex Castro

Electrical Engineering

This project created a user manual on how to generate an easily configurable and implementable Spice model for Field Effect Transistor (FET) devices created in the Cal Poly clean room. The document contained step by step procedures depicting the proper execution techniques and example results for different experiments required to gather the proper information for these models. This testing methodology was shown for finding the numerous different device parameters of a FET, including the I-V curves, threshold voltage, and subthreshold current values. The manual then described how to transfer this data into a new Spice model to allow for simulation …

Potassium And Sodium Sensing Isfet Device And Array, Liam Stephen Hayes

Electrical Engineering

The use of Ion-Sensitive Field Effect Transistors (ISFETs) as a means of testing a person’s potassium concentration in real-time has broad applications in the consumer space. An avid runner could use such a device to keep track of their hydration and salt levels. A hospital could use it for patients who require around-the-clock remote monitoring, and a variation of ISFETs are currently being used as continuous glucose monitors for diabetes patients. While ISFETs are not a new development in the field of microelectronics, their use as wearable devices has recently become relevant. The goal of this project is primarily to …

Design And Implementation Of Solid/Solid Phononic Crystal Structures In Lateral Extensional Thin-Film Piezoelectric On Silicon Micromechanical Resonators, Abdulrahman Alsolami

USF Tampa Graduate Theses and Dissertations

Achieving high quality factor in MEMS resonator devices is a critical demand for today’s wireless communication and sensing technologies. In order to reach this goal, several dedicated prior works have been conducted based on published literature at different frequency ranges. Particularly, piezoelectrically transduced resonators, which are widely deployed in commercial wireless communication systems, could benefit from greatly improved qualify factor. So far, their development has evolved from thin film bulk acoustic resonators (FBAR’s) using surface attached piezoelectric thin-film transducers with moderate Q factors to high Q resonators equipped with a side-supporting tether (anchor) attached vibrating resonators that allow the devices …

Parylene Based Flexible Multifunctional Biomedical Probes And Their Applications, Zhiguo Zhao

Wayne State University Dissertations

MEMS (Micro Electro Mechanical System) based flexible devices have been studied for decades, and they are rapidly being incorporated into modern society in various forms such as flexible electronics and wearable devices. Especially in neuroscience, flexible interfaces provide tremendous possibilities and opportunities to produce reliable, scalable and biocompatible instruments for better exploring neurotransmission and neurological disorders. Of all the types of biomedical instruments such as electroencephalography (EEG) and electrocorticography (ECoG), MEMS-based needle-shape probes have been actively studied in recent years due to their better spatial resolution, selectivity, and sensitivity in chronical invasive physiology monitoring. In order to address the inherent …

Design And Fabrication Of Germanium-Based Guided-Mode Resonance Infrared Reflectors And Gold-Based Nanocavity Plasmonic Arrays, Daniel John Carney

Electrical Engineering Dissertations

Design, fabrication, and measurement techniques for germanium-based guided-mode resonance infrared wideband reflectors and applications of guided-mode resonance devices for sensing and measurement applications are presented. Germanium is a versatile semiconductor with physical properties similar to silicon but optical properties that make it well suited for the infrared wavelengths. It has a high refractive index and negligible absorption in the mid to far infrared spectral region that can be used to create high field confinement necessary for wideband and high quality factor devices. Fabrication of germanium devices becomes straight-forward once the physical matters of germanium’s material bonding properties and surface chemistries …

Furnace System Improvements, Kenji K. Anzai, Ethan Fedor, Patrick Zailaa

Mechanical Engineering

This Final Design Review (FDR) documents the work done by the group to manufacture the system to deliver improvements to the furnace in the Cal Poly microfabrication laboratory (better known as the cleanroom). The document describes the material covered in the Scope of Work (SOW), including background research, customer needfinding, and the problem statement, material associated with concept development and selection for Preliminary Design Review (PDR), material detailing the design and manufacturing plan of the system for Critical Design Review (CDR), and new material detailing the manufacture of the system for FDR.

Research done for the SOW resulted in a …

Nanofluidic Applications Of Silica Membranes, John Michael Stout

Theses and Dissertations

This work presents membrane development applicable in nanofluidic devices. These membranes can also be termed suspended thin films, supported on two or more edges. I first discuss motivation and background for developing these structures. Then I derive the formative principles for nanofluidic systems. Following the derivation of the Navier-Stokes and Washburn equations, I discuss applying these theories to planar nanofluidic capillaries and finish the derivation by discussing the forces that drive liquid flow in nanochannels. I next discuss the membrane development process, starting with my work in static height traps, and develop the concept of analyzing nanoparticles using suspended membranes. …

Development Of 3-D Printed Hybrid Packaging For Gaas-Mems Oscillators Based On Piezoelectrically-Transduced Zno-On-Soi Micromechanical Resonators, Di Lan

USF Tampa Graduate Theses and Dissertations

Prior research focused on CMOS-MEMS integrated oscillator has been done using various foundry compatible integration techniques. In order to compensate the integration compatibility, MEMS resonators built on standard CMOS foundry process could not take full advantage of highest achievable quality factor on chip. System-in-package (SiP) and system-on-chip (SoC) is becoming the next generation of electronic packaging due to the need of multi-functional devices and multi-sensor systems, thus wafer level hybrid integration becomes the key to enable the full assembly of dissimilar devices. In this way, every active circuit and passive component can be individually optimized, so do the MEMS resonators …

Multiplexed Optofluidics For Single-Molecule Analysis, Matthew Alan Stott

Theses and Dissertations

The rapid development of optofluidics, the combination of microfluidics and integrated optics, since its formal conception in the early 2000's has aided in the advance of single-molecule analysis. The optofluidic platform discussed in this dissertation is called the liquid core anti-resonant reflecting optical waveguide (LC-ARROW). This platform uses ARROW waveguides to orthogonally intersect a liquid core waveguide with solid core rib waveguides for the excitation of specifically labeled molecules and collection of fluorescence signal. Since conception, the LC-ARROW platform has demonstrated its effectiveness as a lab-on-a-chip fluorescence biosensor. However, until the addition of optical multiplexing excitation waveguides, the platform lacked …

Development Mems Acoustic Emission Sensors, Adrian Enrique Avila Gomez

USF Tampa Graduate Theses and Dissertations

The purpose of this research is to develop MEMS based acoustic emission sensors for structural health monitoring. Acoustic emission (AE) is a well-established nondestructive testing technique that is typically used to monitor for fatigue cracks in structures, leaks in pressurized systems, damages in composite materials or impacts. This technology can offer a precise evaluation of structural conditions and allow identification of imminent failures or minor failures that can be addressed by planned maintenances routines. AE causes a burst of ultrasonic energy that is measured as high frequency surface vibrations (30 kHz to 1 MHz) generated by transient elastic waves that …

Perforated Hollow Core Waveguides For Alkali Vapor-Cells And Slow Light Devices, Matthieu C. Giraud Carrier

Theses and Dissertations

The focus of this work is the integration of alkali vapor atomic vapor cells into common silicon wafer microfabrication processes. Such integrated platforms enable the study of quantum coherence effects such as electromagnetically induced transparency, which can in turn be used to demonstrate slow light. Slow and stopped light devices have applications in the optical communications and quantum computing fields. This project uses hollow core anti-resonant reflecting optical waveguides (ARROWs) to build such slow light devices. An explanation of light-matter interactions and the physics of slow light is first provided, as well as a detailed overview of the fabrication process. …

Fabrication And Characterization Of Small Scale Photo-Electro-Chemical Solar Cells, Xin Li

Electronic Theses and Dissertations

This thesis presents fabrication and characterization of a small scale photoelectro-chemical (PEC) solar cell.

The cell consists of a p-type silicon cathode with an etched micro-cavity that houses the zinc chloride electrolyte solution, and the cavity is covered by a sheet of zinc acting as the anode. The cell operates using a semiconductor-electrolyte junction instead of the p-n junction of a conventional solid state solar cell. The silicon electrode is fabricated by controlled wet etching so that the bottom of the micro-cavity becomes a very thin membrane, which allows photons to penetrate and reach the semiconductorelectrolyte interface for the generation …

Liquid Core Waveguide Sensors With Single And Multi-Spot Excitation, Lynnell Uilani Wai Yee Zempoaltecatl

Theses and Dissertations

Using silicon based microfabrication and materials, a photonic platform, capable of single bioparticle analysis, has been developed. This platform combines liquid and hollow core waveguides on the micron-scale (5 µm x 12 µm) to isolate femtoliter sized sample volumes. Fluorescence excitation and signals in the visible range are directed into and out of the sample volume at an orthogonal angle to maximize signal-to-noise. In order to guide light in a low-index material antiresonant reflecting optical waveguides (ARROWs) were incorporated into the platform. This thesis reveals the development path of these structures over several device generations including innovations in material, geometries, …

Microfluidics Guided By Redox-Magnetohydrodynamics (Mhd) For Lab-On-A-Chip Applications, Vishal Sahore

Graduate Theses and Dissertations

Unique microfluidic control actuated by simply turning off and on microfabricated electrodes in a small-volume system was investigated for lab-on-a-chip applications. This was accomplished using a relatively new pumping technique of redox-magnetohydrodynamics (MHD), which as shown in this dissertation generated the important microfluidic features of flat flow profile and fluid circulation. MHD is driven by the body force, FB = j × B, which is the magnetic part of the Lorentz force equation, and its direction is given by the right hand rule. The ionic current density, j, was generated in an equimolar solution of potassium ferri/ferro cyanide by applying …

Arrow-Based On-Chip Alkali Vapor-Cell Development, John Frederick Hulbert

Theses and Dissertations

The author presents the successful development of an on-chip, monolithic, integrated rubidium vapor-cell. These vapor-cells integrate ridge waveguide techniques with hollow-core waveguiding technology known as Anti-Resonant Reflecting Optical Waveguides (ARROWs). These devices are manufactured on-site in BYU's Integrated Microelectronic Laboratory (IML) using common silicon wafer microfabrication techniques. The ARROW platform fabrication is outlined, but the bulk of the dissertation focuses on novel packaging techniques that allow for the successful introduction and sealing of rubidium vapor into these micro-sized vapor-cells. The unique geometries and materials utilized in the ARROW platform render common vapor-cell sealing techniques unusable. The development of three generations …

Microfabrication Processes And Advancements In Planar Electrode Ion Traps As Mass Spectrometers, Brett Jacob Hansen

Theses and Dissertations

This dissertation presents advances in the development of planar electrode ion traps. An ion trap is a device that can be used in mass analysis applications. Electrode surfaces create an electric field profile that trap ionized molecules of an analyte. The electric fields can then be manipulated to mass-selectively eject ions out of the trap into a detector. The resulting data can be used to analyze molecular structure and composition of an unknown compound. Conventional ion traps require machined electrode surfaces to form the electric trapping field. This class of electrode presents significant obstacles when attempting to miniaturize ion traps …

Microfabrication Of Conductive Polymer Nanocomposite For Sensor Applications, Chaoxuan Liu

LSU Doctoral Dissertations

This dissertation developed novel microfabrication techniques of conductive polymer nanocomposite and utilized this material as a functional element for various physical sensor applications. Microstructures of nanocomposite were realized through novel microcontact printing and laser ablation assisted micropatterning processes. Prototype devices including large-strain strain sensor and highly-sensitive pressure sensor were demonstrated showing distinct advantages over existing technologies. The polymer nanocomposite used in this work comprised elastomer poly(dimexylsiloxane) (PDMS) as polymer matrix and multi-walled carbon nananotubes (MWCNTs) as a conductive nanofiller. To achieve uniform distribution of carbon nanotubes within the polymer, an optimized dispersion process was developed, featuring a strong organic solvent—chloroform, …

Fabrication Of Hollow Optical Waveguides On Planar Substrates, John P. Barber

Theses and Dissertations

This dissertation presents the fabrication of hollow optical waveguides integrated on planar substrates. Similar in principle to Bragg waveguides and other photonic crystal waveguides, the antiresonant reflecting optical waveguide (ARROW) is used to guide light in hollow cores filled with liquids or gases. Waveguides with liquid or gas cores are an important new building block for integrated optical sensors. The fabrication method developed for hollow ARROW waveguides makes use of standard microfabrication processes and materials. Dielectric layers are deposited on a silicon wafer using plasma-enhanced chemical vapor deposition (PECVD) to form the bottom layers of the ARROW waveguide. A sacrificial …

Design And Optimization Of Nano-Optical Elements By Coupling Fabrication To Optical Behavior, Raymond Rumpf

Electronic Theses and Dissertations

Photonic crystals and nanophotonics have received a great deal of attention over the last decade, largely due to improved numerical modeling and advances in fabrication technologies. To this day, fabrication and optical behavior remain decoupled during the design phase and numerous assumptions are made about "perfect" geometry. As research moves from theory to real devices, predicting device behavior based on realistic geometry becomes critical. In this dissertation, a set of numerical tools was developed to model micro and nano fabrication processes. They were combined with equally capable tools to model optical performance of the simulated structures. Using these tools, it …

Layer-By-Layer Nanoassembly Combined With Microfabrication Techniques For Microelectronics And Microelectromechanical Systems, Jingshi Shi

Doctoral Dissertations

The objective of this work is to investigate the combination of layer-by-layer self-assembly with microfabrication technology and its applications in microelectronics and MEMS.

One can assemble, on a standard silicon wafer, needed multilayers containing different nanoparticles and polymers and then apply various micromanufacturing techniques to form microdevices with nanostructured elements.

Alternate layer-by-layer self-assembly of linear polyions and colloidal silica at elevated temperatures have been firstly studied by QCM and SEM. LbL self-assembly and photolithography were combined to fabricate an indium resistor. The RTA method was employed in the fabrication. Hot-embossing technique as a reasonably fast and moderately expensive technique was …

Polymer-Based Capacitors, Junction Field -Effect Transistors, And A Follower Circuit By Lithography, Self -Assembly, And Ink -Jet Printing Techniques, Yuxin Liu

Doctoral Dissertations

The study of organic materials to create field-effect transistors has recently emerged and is gaining much interest. All-polymer electronic devices are currently in their infancy, like semiconductor devices when they first appeared. As a result, current performance of these devices is in no way comparable to the state-of-the-art semiconductor devices. However, all-polymer devices have a few possible appealing advantages. First, all polymer devices have the potential for low-cost fabrication due to their ease of manufacturability, with fewer and simpler processing steps compared with solid-state semiconductor devices. Secondly, polymer devices offer the ability of material flexibility. Lastly, polymer devices may prove …