Engineering Commons^™

Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda

Theses and Dissertations

The Air Force Research Laboratory Materials and Manufacturing Directorate have developed a novel protein impregnated polymer (PIP) suspension that changes resistivity as a function of absorbed infrared radiation. Due to this property, the PIP is a potential material for use as an uncooled bolometer, or thermal sensor. In this research, a thermally-isolated pixel design, sensor characterization methods, and sensor fabrication and processing steps were developed. To create a microbolometer, the PIP was applied to two prototype micro-electro-mechanical systems (MEMS) surface micro-machined structures. The first is a raised cantilever pixel array that uses residual stress polysilicon and metal film arms to …

Biosensing With Microcantilever-Based Sensors, Xiaodong Yan

Doctoral Dissertations

Microcantilevers provide an ideal platform for biosensors. The micron-sized transducer brings several advantages, such as high sensitivity, small sample quantity for analysis, portability, implantable sensor devices, and the ability to be mass produced and integrated into standard microelectronic processing technologies like complementary metal oxide seminconductors (CMOS).

The objective of this research is to investigate and develop modification methods of microcanitlevers for biosensing applications.

Two microcantilever modification methods were investigated. They are self-assembly monolayer method and layer-by-layer method. A fundamental procedure for modification of microcantilevers using the layer-by-layer approach was developed for the first time in this research. These modification methods …