Engineering Commons^™

Dual Material Gate Field Effect Transistor (Dmg-Fet), Wei Long

Dissertations

Improving performance and suppressing short channel effects are two of the most important issues in present field effect transistors development. Hence, high performance and long channel like behaviors are essential requirements for short channel FETs. This dissertation focuses on new ways to achieve these significant goals. A new field effect transistor - dual material gate FET (DMG-FET) - is presented for the first time. The unique feature of the DMG-FET is its gate which consists of two laterally contacting gate materials with different work functions. This novel gate structure takes advantage of material work function difference in such a way …

Micro Electromechanical Relays And Their Application In Variable Inductor Networks, Shifang Zhou

Dissertations

A family of microrelay devices together with integrated inductor networks has been designed, simulated, fabricated and experimental characterized. These switched networks utilize microelectromechanical systems (MEMS) as a fabrication technology and take advantage of the economies of semiconductor cleanroom batch-processing.

A new type of microrelay has been developed using a suspended TaSi₂/SiO₂ bimorph cantilever beam, gold-to-gold electrical contact, aluminum as sacrificial layer, and a combined thermal and electrostatic means of actuation. For the first time a micro variable inductor network which is digitally controlled by microrelays has been demonstrated. A test structure for electrical micro contact characterization has …