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Electrical and Computer Engineering

Theses/Dissertations

1998

Actuators

Articles 1 - 2 of 2

Full-Text Articles in Engineering

High Amplitude Tracking Control, Joseph W. Mcnamee Jun 1998

High Amplitude Tracking Control, Joseph W. Mcnamee

Theses and Dissertations

The problem of tracking control in the face of high amplitude dynamic reference signals, hard state and control constraints, and open-loop unstable plants is investigated. Saturation effects mitigation is a current research topic, and a large body of literature exists which addresses this problem. However, with a few notable exceptions, little work has been accomplished which is applicable to the problem of high amplitude dynamic reference signal tracking in the face of hard state and control constraints, and open-loop unstable plants. Moreover, methods that do address the stated problem generally limit the exogenous reference signal to statically admissible values to …


Development And Packaging Of Microsystems Using Foundry Services, Jeffrey T. Butler Jun 1998

Development And Packaging Of Microsystems Using Foundry Services, Jeffrey T. Butler

Theses and Dissertations

Micro-electro-mechanical systems (MEMS) are a new and rapidly growing field of research. Several advances to the MEMS state of the art were achieved through design and characterization of novel devices. Empirical and theoretical model of polysilicon thermal actuators were developed to understand their behavior. The most extensive investigation of the Multi-User MEMS Processes (MUMPs) polysilicon resistivity was also performed. The first published value for the thermal coefficient of resistivity (TCR) of the MUMPs Poly 1 layer was determined as 1.25 x 10(exp -3)/K. The sheet resistance of the MUMPs polysilicon layers was found to be dependent on linewidth due to …