Engineering Commons^™

Rf Mems Resonators For Mass Sensing Applications, Ivan Fernando Rivera

USF Tampa Graduate Theses and Dissertations

Sensing devices developed upon resonant microelectromechanical and nanoelectromechanical (M/NEMS) system technology have become one of the most attractive areas of research over the past decade. These devices make exceptional sensing platforms because of their miniscule dimensions and resonant modes of operation, which are found to be extremely sensitive to added mass. Along their unique sensing attributes, they also offer foundry compatible microfabrication processes, low DC power consumption, and CMOS integration compatibility. In this work, electrostatically and piezoelectrically actuated RF MEMS bulk resonators have been investigated for mass sensing applications. The capacitively-transduced resonators employed electrostatic actuation to achieve desired resonance mode …

Development Of Electroplated-Ni Structured Micromechanical Resonators For Rf Application, Mian Wei

USF Tampa Graduate Theses and Dissertations

On-chip vibrating MEMS resonators with high frequency-Q product on par with that of the off-chip quartz crystals have attracted lots of attention from both academia and industry for applications on sensing, signal processing, and wireless communication. Up to now, several approaches for monolithic integration of MEMS and transistors have been demonstrated. Vibrating micromechanical disk resonators which utilize electroplated nickel as the structural material along with either a solid-gap high-k dielectric capacitive transducer or a piezoelectric transducer have great potential to offer unprecedented performance and capability of seamless integration with integrated circuits.

Despite the frequency drift problems encountered in early attempts …

Low Loss Vhf And Uhf Filters For Wireless Communications Based On Piezoelectrically-Transduced Micromechanical Resonators, Julio Mario Dewdney

USF Tampa Graduate Theses and Dissertations

For the past decade, a great deal of research has been focused towards developing a viable on-chip solution to replace the current state-of-the-art VHF and UHF filters based on SAW and FBAR technologies. Although filters based on SAW and FBAR devices are capable of fulfilling the basic requirements needed for IF and RF bandpass filtering and reference signal generation, an alternative solution that can enable the next generation of multi-frequency and multi-mode transceivers while enabling size and price reduction by allowing the manufacturing of single-chip monolithic RF transceivers is highly desired. In response to these new needs, piezoelectrically-transduced micromechanical filters …