Engineering Commons^™

Rf Mems Resonators For Mass Sensing Applications, Ivan Fernando Rivera

USF Tampa Graduate Theses and Dissertations

Sensing devices developed upon resonant microelectromechanical and nanoelectromechanical (M/NEMS) system technology have become one of the most attractive areas of research over the past decade. These devices make exceptional sensing platforms because of their miniscule dimensions and resonant modes of operation, which are found to be extremely sensitive to added mass. Along their unique sensing attributes, they also offer foundry compatible microfabrication processes, low DC power consumption, and CMOS integration compatibility. In this work, electrostatically and piezoelectrically actuated RF MEMS bulk resonators have been investigated for mass sensing applications. The capacitively-transduced resonators employed electrostatic actuation to achieve desired resonance mode …