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Electrical and Computer Engineering

Theses and Dissertations

Oxidation

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Growth And Characterization Of Gallium Oxide Thin Films And Devices, Jorge Castillo Dec 2017

Growth And Characterization Of Gallium Oxide Thin Films And Devices, Jorge Castillo

Theses and Dissertations

Gallium oxide has promising physical and electrical properties for power applications and optoelectronics. thermally grown oxide developed from sputtered GaN layers and gallium oxide substrates will be characterized. The study will evaluate a variety of temperatures in order to investigate the advantages and disadvantages on each of the synthetization techniques.