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Low Temperature Carbon Material Deposition With Photo-Enhanced Chemical Vapor Deposition, Kyungnam Kang
Low Temperature Carbon Material Deposition With Photo-Enhanced Chemical Vapor Deposition, Kyungnam Kang
LSU Doctoral Dissertations
Photo-enhanced chemical vapor deposition (CVD) technique is investigated here for low temperature deposition of carbon nanotubes (CNTs) and hexagonal diamond. Most current deposition methods require high substrate temperature. Photo-enhanced CVD utilizes light energy to dissociate carbon containing precursor molecules and hence has a potential for low temperature deposition. CCl4, having a high absorption coefficient compared to other commonly employed hydrocarbons in the UV emission spectrum from a Xe arc lamp, is selected as a carbon precursor in this work. Extensive experimentation conducted by varying Al/Ni/Al catalyst layer thicknesses on SiO2 coated Si substrates, substrate annealing temperature in the range 350 …
Carbon Nanotube Interconnect Modeling For Very Large Scale Integrated Circuits, Yao Xu
Carbon Nanotube Interconnect Modeling For Very Large Scale Integrated Circuits, Yao Xu
LSU Doctoral Dissertations
In this research, we have studied and analyzed the physical and electrical properties of carbon nanotubes. Based on the reported models for current transport behavior in non-ballistic CNT-FETs, we have built a dynamic model for non-ballistic CNT-FETs. We have also extended the surface potential model of a non-ballistic CNT-FET to a ballistic CNT-FET and developed a current transport model for ballistic CNT-FETs. We have studied the current transport in metallic carbon nanotubes. By considering the electron-electron interactions, we have modified two-dimensional fluid model for electron transport to build a semi-classical one-dimensional fluid model to describe the electron transport in carbon …