Engineering Commons^™

Generation Of Plasma With A Rotating Electric Field, Franklin Price Mosely

Electrical & Computer Engineering Theses & Dissertations

Nonthermal plasma generation is an important area of research that has many applications ranging from semiconductor production to medical applications including the treatment of cancers and sterilization of surfaces. Specific radicals and excited species and discharge powers are critical for the successful completion of these processes. It is important that these excited species are shown to be achievable for a given discharge system without leading to instabilities such as arcing.

The present thesis details the design, fabrication, testing, and analysis of a novel plasma generation system based on multiphase excitation. As predicted by theory, the experimental results demonstrate that a …

Hardware Development For The Generation Of Large-Volume High Pressure Plasma By Spatiotemporal Control Of Space Charge, Nikhil Boothpur

Electrical & Computer Engineering Theses & Dissertations

While generating a plasma under laboratory conditions, any attempt to scale the pressure and volume leads to instabilities due to the build-up of localized space-charge. This poses a challenge in the design of the discharge chamber, type of excitation field, and the type of gas that is used in the discharge. This work investigates a spatially and temporally varying electric field to control the formation of space-charge in large-volume (greater than 5 mm in the smallest dimension) near atmospheric pressure. The simulations show that in a space-charge dominated transport, the charged species disperse both in azimuthal and radial directions in …

Multi-Term Approximation To The Boltzmann Transport Equation For Electron Energy Distribution Functions In Nitrogen, Yue Feng

Electrical & Computer Engineering Theses & Dissertations

Plasma is currently a hot topic and it has many significant applications due to its composition of both positively and negatively charged particles. The energy distribution function is important in plasma science since it characterizes the ability of the plasma to affect chemical reactions, affect physical outcomes, and drive various applications. The Boltzmann Transport Equation is an important kinetic equation that provides an accurate basis for characterizing the distribution function—both in energy and space.

This dissertation research proposes a multi-term approximation to solve the Boltzmann Transport Equation by treating the relaxation process using an expansion of the electron distribution function …

Atmospheric-Pressure Plasma Sources For Polymer Surface Modification, Shujun Yang

Electrical & Computer Engineering Theses & Dissertations

Plasma processing is widely used in the microelectronics industry for deposition of thin films. It is also used in etching of semiconductors, metals and organic materials such as photoresists. In addition, plasmas are widely used to modify material surfaces. Plasma surface modification can improve the surface adhesion of polymeric materials, which can be used as insulating layers in multilayer semiconductor structures. In deposition and etching, relatively a large amount of material is added to or removed from the surface. In plasma surface modification, only the surface layer is changed in composition or structure, and no significant amount of material is …