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Sensing And Control Of Mems Accelerometers Using Kalman Filter, Kai Zhang
Sensing And Control Of Mems Accelerometers Using Kalman Filter, Kai Zhang
ETD Archive
Surface micromachined low-capacitance MEMS capacitive accelerometers which integrated CMOS readout circuit generally have a noise above 0.02g. Force-to-rebalance feedback control that is commonly used in MEMS accelerometers can improve the performances of accelerometers such as increasing their stability, bandwidth and dynamic range. However, the controller also increases the noise floor. There are two major sources of the noise in MEMS accelerometer. They are electronic noise from the CMOS readout circuit and thermal-mechanical Brownian noise caused by damping. Kalman filter is an effective solution to the problem of reducing the effects of the noises through estimating and canceling the states contaminated …
Modeling And Feedback Control Of A Mems Electrostatic Actuator, Jason Edwards
Modeling And Feedback Control Of A Mems Electrostatic Actuator, Jason Edwards
ETD Archive
This thesis describes the mathematical modeling and closed-loop voltage control of a MEMS electrostatic actuator. The control goal is to extend the travel range of the actuator beyond the open-loop pull-in limit of one third of the initial gap. Three controller designs are presented to reach the control goal. The first controller design utilizes a regular fourth order Active Disturbance Rejection Controller (ADRC) and is able to achieve 97 of the maximum travel range. The second design also uses a fourth order ADRC, while additional modeling information is included in an Extended State Observer (ESO), which is part of the …
Hardware Implementation Of Active Disturbance Rejection Control For Vibrating Beam Gyroscope, David Avanesian
Hardware Implementation Of Active Disturbance Rejection Control For Vibrating Beam Gyroscope, David Avanesian
ETD Archive
Obtaining the approximation of rotation rate form a Z-Axis MEMS gyroscope is a challenging problem. Currently, most commercially available MEMS gyroscopes are operating in an open-loop for purposes of simplicity and cost reduction. However, MEMS gyroscopes are still fairly expensive and are not robust during operation. The purpose of this research was to develop a high-performance and low-cost MEMS gyroscope using analog Active Disturbance Rejection Control (ADRC) system. By designing and implementing analog ADRC both above requirements were satisfied. Analog ADRC provides the fastest response time possible (because the circuit is analog), eliminates both internal and external disturbances, and increases …