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Electrical and Computer Engineering

University of Central Florida

Oxidation

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Characterization, Morphology, Oxidation, And Recession Of Silicon Nanowires Grown By Electroless Process, Robert G. Mertens Jan 2012

Characterization, Morphology, Oxidation, And Recession Of Silicon Nanowires Grown By Electroless Process, Robert G. Mertens

Electronic Theses and Dissertations

This dissertation presents heretofore undiscovered properties of Silicon Nanowires (SiNWs) grown by electroless process and presents mathematical solutions to the special problems of the oxidation and diffusion of dopants for SiNWs. Also presented here is a mathematical description of morphology of oxidized SiNWs. This dissertation is comprised of several discussions relating to SiNWs growth, oxidation, morphology and doping. In here is presented work derived from a long-term study of SiNWs. Several important aspects of SiNWs were investigated and the results published in journals and conference papers. The recession of SiNWs was heretofore unreported by other research groups. In our investigations, …