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Simulation Of Magnetically Confined Inductively Coupled Plasma, Sina Javadpour
Simulation Of Magnetically Confined Inductively Coupled Plasma, Sina Javadpour
Electronic Theses and Dissertations
In this work, a new parallel coil design was presented to address the need for high density inductively coupled plasmas with enhanced properties and a more uniform and consistent distribution, suitable for large-area material processing. Fluid model simulations of 3D argon inductively coupled plasma (ICP) were performed in COMSOL for the proposed coil and a conventional single cylindrical coil with the same impedance to be used as reference, to compare and evaluate the performance of this new halftoroidal parallel coil design and study its effects on the main variables of the generated plasma. Through different comparisons of the simulations results, …
Plasma Treatment Of Zinc Oxide Thin Film And Temperature Sensing Using The Zinc Oxide Thin Film, Al-Ahsan Talukder
Plasma Treatment Of Zinc Oxide Thin Film And Temperature Sensing Using The Zinc Oxide Thin Film, Al-Ahsan Talukder
Electronic Theses and Dissertations
Zinc oxide is a direct and wide bandgap, II-VI semiconductor. It has large exciton binding energy, large piezoelectric constant, strong luminescence, and high thermal conductivity. These properties make zinc oxide as a suitable material for various optoelectronic applications. Vacuum based processes of fabrication of zinc oxide thin film dominate the market for their better electrical and optical properties. In this work, zinc oxide thin films were prepared by easy and low cost solution method with oriented crystal growth along (002) plane. To improve electrical and optical property of the fabricated zinc oxide thin films, films were treated with oxygen, hydrogen, …