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Fabrication And Characterization Of Radio-Frequency Sensors For Liquid Material Detection, Yuxi He

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This thesis presents a series of studies on fabrication and characterization of radio-frequency (RF) sensors. In the light of Electromagnetics and Transmission Line Theory, we designed multiple RF sensors with different detection capability emphasis and used them to detect various materials, especially liquid samples and materials in solutions such as dielectric thin films, confined liquids, red blood cells, and malarial pigments (hemozoin). Most sensors were fabricated under clean room environment following the standard process protocols. Proper process developments were also made to achieve special structures and functionalities of our novel sensors. Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) …