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Full-Text Articles in Engineering
Compact Trench-Based Silicon-On-Insulator Rib Waveguide Ring Resonator With Large Free Spectral Range, Seunghyun Kim, Gregory P. Nordin, Weisheng Hu, Yusheng Qian, Jiguo Song, Gregory L. Wojcik
Compact Trench-Based Silicon-On-Insulator Rib Waveguide Ring Resonator With Large Free Spectral Range, Seunghyun Kim, Gregory P. Nordin, Weisheng Hu, Yusheng Qian, Jiguo Song, Gregory L. Wojcik
Faculty Publications
We demonstrate a compact trench-based silicon-on-insulator (SOI) rib waveguide ring resonator comprised of trench-based bends and splitters. It has a perimeter of 50 μm and occupies an area of only 25×25 μm. The measured free spectral range (FSR) is 13.2 nm, which the largest reported for an SOI rib waveguide ring resonator. The measured FSR, full width at half maximum, and quality factor match reasonably well with analytical calculations. Further calculation shows that a FSR of 50.8 nm is achievable for an SOI rib waveguide ring resonator with a perimeter of 15 μm.
Compact Trench Based Bend And Splitter Devices For Silicon-On-Insulator Rib Waveguides, Yusheng Qian
Compact Trench Based Bend And Splitter Devices For Silicon-On-Insulator Rib Waveguides, Yusheng Qian
Theses and Dissertations
Bends and splitters are typically the fundamental limiting waveguide components in reducing the size of planar lightwave circuits (PLCs) based on waveguides that have a low core/clad refractive index contrast, such as silicon-on-insulator (SOI) rib waveguides. This dissertation presents a solution to this problem in the form of trench-based bends (TBBs) and trench-based splitters (TBSs). Emphasis is placed on experimental demonstration of these components and their integration into practical devices exhibiting significant size reduction. First, a compact and low loss silicon-on-insulator rib waveguide 90◦ TBB is demonstrated based on an etched vertical interface and total internal reflection (TIR) realized by …
Compact Waveguide Splitter Networks, Seunghyun Kim, Gregory P. Nordin, Weisheng Hu, Yusheng Qian, Jiguo Song
Compact Waveguide Splitter Networks, Seunghyun Kim, Gregory P. Nordin, Weisheng Hu, Yusheng Qian, Jiguo Song
Faculty Publications
We demonstrate compact waveguide splitter networks in siliconon-insulator (SOI) rib waveguides using trench-based splitters (TBSs) and bends (TBBs). Rather than a 90° geometry, we use 105° TBSs to facilitate reliable fabrication of high aspect ratio trenches suitable for 50/50 splitting when filled with SU8. Three dimensional (3D) finite difference time domain (FDTD) simulation is used for splitter and bend design. Measured TBB and TBS optical efficiencies are 84% and 68%, respectively. Compact 105° 1 x 4, 1 x 8, and 1 x 32 trench-based splitter networks (TBSNs) are demonstrated. The measured total optical loss of the 1 x 32 TBSN …
Air-Trench Splitters For Ultra-Compact Ring Resonators In Low Refractive Index Contrast Waveguides, Seunghyun Kim, Gregory P. Nordin, Yongbin Lin, Nazli Rahmanian
Air-Trench Splitters For Ultra-Compact Ring Resonators In Low Refractive Index Contrast Waveguides, Seunghyun Kim, Gregory P. Nordin, Yongbin Lin, Nazli Rahmanian
Faculty Publications
We demonstrate air-trench splitters in low index contrast perfluorocyclobutyl (PFCB) waveguides. Splitters are fabricated by etching 800 nm wide high aspect ratio (18:1) trenches. The measured optical loss is 0.4 dB/splitter. The reflection/transmission splitting ratio is 0.859/0.141, which closely matches two-dimensional finite difference time domain (2DFDTD) simulation results. Air-trench splitters and bends are used to demonstrate an ultra-compact ring resonator (RR) with a size reduction of 1,700 compared to a RR based on traditional curved waveguides in the same material system. A comparison between the RR’s measured and analytically calculated performance shows close agreement when splitter and bend losses are …
Compact And Low Loss Silicon-On-Insulator Rib Waveguide 90° Bend, Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, Jianhua Jiang
Compact And Low Loss Silicon-On-Insulator Rib Waveguide 90° Bend, Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, Jianhua Jiang
Faculty Publications
A compact and low loss silicon-on-insulator rib waveguide 90° bend is designed and demonstrated. An interface realized by a trench filled with SU8 at the corner of a waveguide bend effectively reflects incoming light through total internal reflection (TIR). In order to accurately position the SU8-filled trench relative to the waveguide and reduce sidewall roughness of the interface, electron beam lithography (EBL) is employed while inductively coupled plasma reactive ion etching (ICP RIE) is used to achieve a vertical sidewall. The measured loss for TE polarization is 0.32 dB ± 0.02 dB/bend at a wavelength of 1.55 µm.