Engineering Commons^™

An Integrated Model Of Optofluidic Biosensor Function And Performance, Joel Greig Wright, Jr.

Theses and Dissertations

Optofluidic flow-through biosensor devices have been in development for fast bio-target detection. Utilizing the fabrication processes developed by the microelectronics industry, these biosensors can be fabricated into lab-on-a-chip devices with a degree of platform portability. This biosensor technology can be used to detect a variety of targets, and is particularly useful for the detection single molecules and nucleic acid strands. Microfabrication also offers the possibility of production at scale, and this will offer a fast detection method for a range of applications with promising economic viability. The development of this technology has advanced to now warrant a descriptive model that …

Machine Learning Methods For Nanophotonic Design, Simulation, And Operation, Alec Michael Hammond

Theses and Dissertations

Interest in nanophotonics continues to grow as integrated optics provides an affordable platform for areas like telecommunications, quantum information processing, and biosensing. Designing and characterizing integrated photonics components and circuits, however, remains a major bottleneck. This is especially true when complex circuits or devices are required to study a particular phenomenon.To address this challenge, this work develops and experimentally validates a novel machine learning design framework for nanophotonic devices that is both practical and intuitive. As case studies, artificial neural networks are trained to model strip waveguides, integrated chirped Bragg gratings, and microring resonators using a small number of simple …

Multiplexed Optofluidics For Single-Molecule Analysis, Matthew Alan Stott

Theses and Dissertations

The rapid development of optofluidics, the combination of microfluidics and integrated optics, since its formal conception in the early 2000's has aided in the advance of single-molecule analysis. The optofluidic platform discussed in this dissertation is called the liquid core anti-resonant reflecting optical waveguide (LC-ARROW). This platform uses ARROW waveguides to orthogonally intersect a liquid core waveguide with solid core rib waveguides for the excitation of specifically labeled molecules and collection of fluorescence signal. Since conception, the LC-ARROW platform has demonstrated its effectiveness as a lab-on-a-chip fluorescence biosensor. However, until the addition of optical multiplexing excitation waveguides, the platform lacked …

Improved Single Molecule Detection Platform Using A Buried Arrow Design, Thomas Allen Wall

Theses and Dissertations

As the microelectronics industry pushes microfabrication processes further, the lab-on-a-chip field has continued to piggy-back off the industry's fabrication capabilities with the goal of producing total chemical and biological systems on small chip-size platforms. One important function of such systems is the ability to perform single molecule detection. There are currently many methods being researched for performing single molecule detection, both macro and micro in scale. This dissertation focuses on an optofluidic, lab-on-a-chip platform called the ARROW biosensor, which possesses several advantages over macro-scale single molecule detection platforms. These advantages include an amplification-free detection scheme, cheap parallel fabrication techniques, rapid …

Liquid Core Waveguide Sensors With Single And Multi-Spot Excitation, Lynnell Uilani Wai Yee Zempoaltecatl

Theses and Dissertations

Using silicon based microfabrication and materials, a photonic platform, capable of single bioparticle analysis, has been developed. This platform combines liquid and hollow core waveguides on the micron-scale (5 µm x 12 µm) to isolate femtoliter sized sample volumes. Fluorescence excitation and signals in the visible range are directed into and out of the sample volume at an orthogonal angle to maximize signal-to-noise. In order to guide light in a low-index material antiresonant reflecting optical waveguides (ARROWs) were incorporated into the platform. This thesis reveals the development path of these structures over several device generations including innovations in material, geometries, …

Tailoring The Spectral Transmission Of Optofluidic Waveguides, Brian S. Phillips

Theses and Dissertations

Optofluidics is a relatively new and exciting field that includes the integration of optical waveguides into microfluidic platforms. The purpose of this field of study is to miniaturize previously developed optical systems used for biological and chemical analysis with the end goal of placing bench-top optics into microscopic packages. Mundane optical alignment and sample manipulation procedures would then be intrinsic to the platform and allow measurements to be completed quickly and with reduced human interaction. Biosensors based on AntiResonant Reflecting Optical Waveguides (ARROWs) consist of hollow-core waveguides used for fluid sample manipulation and analysis, as well as solid-core waveguides used …

Compact Waveguide Splitter Networks, Seunghyun Kim, Gregory P. Nordin, Weisheng Hu, Yusheng Qian, Jiguo Song

Faculty Publications

We demonstrate compact waveguide splitter networks in siliconon-insulator (SOI) rib waveguides using trench-based splitters (TBSs) and bends (TBBs). Rather than a 90° geometry, we use 105° TBSs to facilitate reliable fabrication of high aspect ratio trenches suitable for 50/50 splitting when filled with SU8. Three dimensional (3D) finite difference time domain (FDTD) simulation is used for splitter and bend design. Measured TBB and TBS optical efficiencies are 84% and 68%, respectively. Compact 105° 1 x 4, 1 x 8, and 1 x 32 trench-based splitter networks (TBSNs) are demonstrated. The measured total optical loss of the 1 x 32 TBSN …

Air-Trench Splitters For Ultra-Compact Ring Resonators In Low Refractive Index Contrast Waveguides, Seunghyun Kim, Gregory P. Nordin, Yongbin Lin, Nazli Rahmanian

Faculty Publications

We demonstrate air-trench splitters in low index contrast perfluorocyclobutyl (PFCB) waveguides. Splitters are fabricated by etching 800 nm wide high aspect ratio (18:1) trenches. The measured optical loss is 0.4 dB/splitter. The reflection/transmission splitting ratio is 0.859/0.141, which closely matches two-dimensional finite difference time domain (2DFDTD) simulation results. Air-trench splitters and bends are used to demonstrate an ultra-compact ring resonator (RR) with a size reduction of 1,700 compared to a RR based on traditional curved waveguides in the same material system. A comparison between the RR’s measured and analytically calculated performance shows close agreement when splitter and bend losses are …

Fabrication Of Hollow Optical Waveguides On Planar Substrates, John P. Barber

Theses and Dissertations

This dissertation presents the fabrication of hollow optical waveguides integrated on planar substrates. Similar in principle to Bragg waveguides and other photonic crystal waveguides, the antiresonant reflecting optical waveguide (ARROW) is used to guide light in hollow cores filled with liquids or gases. Waveguides with liquid or gas cores are an important new building block for integrated optical sensors. The fabrication method developed for hollow ARROW waveguides makes use of standard microfabrication processes and materials. Dielectric layers are deposited on a silicon wafer using plasma-enhanced chemical vapor deposition (PECVD) to form the bottom layers of the ARROW waveguide. A sacrificial …

Compact And Low Loss Silicon-On-Insulator Rib Waveguide 90° Bend, Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, Jianhua Jiang

Faculty Publications

A compact and low loss silicon-on-insulator rib waveguide 90° bend is designed and demonstrated. An interface realized by a trench filled with SU8 at the corner of a waveguide bend effectively reflects incoming light through total internal reflection (TIR). In order to accurately position the SU8-filled trench relative to the waveguide and reduce sidewall roughness of the interface, electron beam lithography (EBL) is employed while inductively coupled plasma reactive ion etching (ICP RIE) is used to achieve a vertical sidewall. The measured loss for TE polarization is 0.32 dB ± 0.02 dB/bend at a wavelength of 1.55 µm.

Embedded Slanted Grating Coupler For Vertical Coupling Between Fibers And Silicon-On-Insulator Planar Waveguides, Gregory P. Nordin, J. Jiang, B. Wang

Faculty Publications

We propose a compact and efficient grating coupler for vertical coupling between optical fibers and planar waveguides. A grating with a parallelogram shape is designed to be etched through the entire high-index waveguide core. The coupler is optimized using a microgenetic algorithm coupled with a two-dimensional finite-difference time-domain method. Simulations show that up to 75.8% coupling efficiency can be obtained between a single-mode fiber and a 240-nm-thick silicon-on-insulator planar waveguide.

High Efficiency 90 Degree Silica Waveguide Bend Using An Air Hole Photonic Crystal Region, J. Cai, S. Kim, Gregory P. Nordin, J. Jiang

Faculty Publications

We propose the hybrid integration of an air hole photonic crystal (PhC) structure with a high (0.75%) single-mode silica waveguide to achieve an ultracompact high efficiency 90 bend for transverse-magnetic polarized light. Diffraction from the periodic boundary between the PhC and silica waveguide regions is shown to seriously degrade the optical efficiency of the bend. A microgenetic algorithm ( GA) combined with a two-dimensional finite-difference time-domain method is used to modify the PhC and its boundary layer to suppress this diffraction which in turn maximizes bend efficiency. The final optimized structure has a 99.4% bend efficiency at a wavelength of …

Theory, Design, And Fabrication Of Diffractive Grating Coupler For Slab Waveguide, Kevin Randolph Harper

Theses and Dissertations

This thesis presents the theory design and fabrication of a diffractive grating coupler. The first part of the design process is to choose the period of the grating coupler based on the desired coupling angle. The second part of the design process is to choose the geometry of the grating that gives maximum coupling efficiency based on rigorous analyses.

The diffraction gratings are fabricated by recording the interference between two waves in photoresist. The waveguide is fabricated from silicon nitride that is deposited by chemical vapor deposition. The diffraction grating recording assembly is described along with the grating coupler fabrication …

Micro-Genetic Algorithm Design Of Hybrid Conventional Waveguide And Photonic Crystal Structures, J. Cai, S. Kim, Gregory P. Nordin, J. Jiang

Faculty Publications

We previously proposed the hybrid integration of photonic crystals (PhCs) and conventional index-guided waveguides (CWGs) as a potentially attractive method of realizing compact waveguide elements for large-scale planar lightwave circuits (PLCs). We now examine 90-deg bends and beamsplitters in PhC/CWG structures in which the waveguide core has a high refractive index (3.25) and yet a low refractive index contrast (1.54%) with the clad material. A PhC structure composed of a triangular or square array of air holes is placed at the intersection of input and output waveguides to obtain high efficiency 90-deg bends. We find that diffraction from the boundary …