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Compact Trench Based Bend And Splitter Devices For Silicon-On-Insulator Rib Waveguides, Yusheng Qian
Compact Trench Based Bend And Splitter Devices For Silicon-On-Insulator Rib Waveguides, Yusheng Qian
Theses and Dissertations
Bends and splitters are typically the fundamental limiting waveguide components in reducing the size of planar lightwave circuits (PLCs) based on waveguides that have a low core/clad refractive index contrast, such as silicon-on-insulator (SOI) rib waveguides. This dissertation presents a solution to this problem in the form of trench-based bends (TBBs) and trench-based splitters (TBSs). Emphasis is placed on experimental demonstration of these components and their integration into practical devices exhibiting significant size reduction. First, a compact and low loss silicon-on-insulator rib waveguide 90◦ TBB is demonstrated based on an etched vertical interface and total internal reflection (TIR) realized by …