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Full-Text Articles in Engineering
Root Locus Techniques With Nonlinear Gain Parameterization, Brandon Wellman
Root Locus Techniques With Nonlinear Gain Parameterization, Brandon Wellman
Theses and Dissertations--Mechanical Engineering
This thesis presents rules that characterize the root locus for polynomials that are nonlinear in the root-locus parameter k. Classical root locus applies to polynomials that are affine in k. In contrast, this thesis considers polynomials that are quadratic or cubic in k. In particular, we focus on constructing the root locus for linear feedback control systems, where the closed-loop denominator polynomial is quadratic or cubic in k. First, we present quadratic root-locus rules for a controller class that yields a closed-loop denominator polynomial that is quadratic in k. Next, we develop cubic root-locus rules …
Feedback Control For Electron Beam Lithography, Yugu Yang
Feedback Control For Electron Beam Lithography, Yugu Yang
Theses and Dissertations--Electrical and Computer Engineering
Scanning-electron-beam lithography (SEBL) is the primary technology to generate arbitrary features at the nano-scale. However, pattern placement accuracy still remains poor compared to its resolution due to the open-loop nature of SEBL systems. Vibration, stray electromagnetic fields, deflection distortion and hysteresis, substrate charging, and other factors prevent the electron-beam from reaching its target position and one has no way to determine the actual beam position during patterning with conventional systems. To improve the pattern placement accuracy, spatial-phase-locked electron-beam lithography (SPLEBL) provides feedback control of electron-beam position by monitoring the secondary electron signal from electron-transparent fiducial grids on the substrate. While …