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The Effect Of Irradiation Of Fe And Ar Ion On The Surface Morphology Of Diamond Thin Film Related To The Magnetoresistance Property, Salim Mustofa, Setyo Purwanto, Kenji Mishima
The Effect Of Irradiation Of Fe And Ar Ion On The Surface Morphology Of Diamond Thin Film Related To The Magnetoresistance Property, Salim Mustofa, Setyo Purwanto, Kenji Mishima
Makara Journal of Technology
The irradiation of Fe and Ar ion was applied on the surface of diamond/Si thin film to know its effect on the morphology of thin film.The magnetoresistance property was also studied. Ion irradiation treatment using Fe ion followed by argon ion at the energy of 70keV and a dose of 1 x 1015 ion/cm2 have been conducted on the surface of two types of thin film, diamond/Si (111) and diamond/Si (100). Both thin films were made by using a CVD method, and the thickness of the thin film is 1000-nm. From simulations using the software called Stopping and Range of …