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Lateral-Mode Vibration Of Microcantilever-Based Sensors In Viscous Fluids Using Timoshenko Beam Theory, Joshua Schultz

Dissertations (1934 -)

Dynamic-mode microcantilever-based devices are well suited to biological and chemical sensing applications. However, these applications often necessitate liquid-phase sensing, introducing significant fluid-induced dissipative forces and reducing device quality factors (Q). Recent experimental and analytical research has shown that higher in- fluidQis achieved by exciting microcantilevers in the lateral flexural mode. However, the experimental results show that, for microcantilevers having larger width-to-length (b/L) ratios, the behaviors predicted by current analytical models differ from measurements.

To more accurately model microcantilever resonant behavior in viscous fluids and to improve understanding of lateral-mode sensor performance, a new analytical model is developed, incorporating both viscous …