Engineering Commons^™

New Precursors And Chemistry For The Growth Of Transition Metal Films By Atomic Layer Deposition, Thomas Joseph Knisley

Wayne State University Dissertations

The advancing complexity of advanced microelectronic devices is placing rigorous demands on currently used PVD and CVD deposition techniques. The ALD deposition method is proposed to meet the film thickness and conformality constraints needed by the semiconductor industry in future manufacturing processes. Unfortunately, there is a limited number of chemical precursors available that have high thermal stability, reactivity, and vapor pressure suitable for ALD film growth to occur. These properties collectively contribute to the lack of suitable transition metal precursors available for use in ALD. In this thesis, we report the discovery of a series of novel transition metal diazadienate …

Metal Chalcogenide Nanoparticle Gel Networks: Their Formation Mechanism And Application For Novel Material Generation And Heavy Metal Remediation Via Cation Exchange Reactions, Irina Ramona Pala

Wayne State University Dissertations

METAL CHALCOGENIDE NANOPARTICLE GEL NETWORKS: THEIR FROMATION MECHANISM AND APPLICATION FOR NOVEL MATERIAL GENERATION AND HEAVY METAL REMEDIATION VIA CATION EXCHANGE REACTIONS

by

IRINA R. PALA

February 2012

Advisor: Dr. Stephanie L. Brock

Major: Chemistry

Degree: Doctor of Philosophy

The dissertation research is focused on (1) uncovering the mechanism of metal chalcogenide nanoparticle gel formation; (2) extending the cation exchange reaction protocol to zinc sulfide gel networks, with the goal of accessing new aerogel chemistries and understanding the factors that drive the process; and (3) conducting a quantitative analysis of the ability of ZnS aerogels to remove heavy metal ions …

Techniques For Sensor-Integrated Robotic Systems: Raman Spectra Analysis, Image Guidance, And Kinematic Calibration, Luke Anthony Reisner

Wayne State University Dissertations

Robotics and sensor technology have made impressive advancements over the years. There are now robotic systems that help perform surgeries or explore the surface of Mars, and there are sensors that detect trace amounts of explosives or identify diseased human tissue. The most powerful systems integrate robots and sensors, which are natural complements to each other. Sensors can provide information that might otherwise be unavailable due to indirect robotic manipulation (e.g., images of the target environment), and robots can provide suitably precise positioning of an analytical sensor.

To have an effective sensor-integrated robotic system, multiple capabilities are needed in the …