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Full-Text Articles in Engineering

Highly Plasma Etch-Resistant Photoresist Composition Containing A Photosensitive Polymeric Titania Precursor, Tony D. Flaim, Douglas J. Guerrero, Michelle R. Fowler, William Joseph James, Vladimir Petrovsky, Harlan U. Anderson Oct 2001

Highly Plasma Etch-Resistant Photoresist Composition Containing A Photosensitive Polymeric Titania Precursor, Tony D. Flaim, Douglas J. Guerrero, Michelle R. Fowler, William Joseph James, Vladimir Petrovsky, Harlan U. Anderson

Chemistry Faculty Research & Creative Works

A composition is derived from an addition polymerizable organotitanium polymer which upon exposure to an oxygen plasma or baking in air, is converted to titanium dioxide (titania) or is converted to a mixed, titanium-containing metal oxide. The metal oxide formed in situ imparts etch- resistant action to a patterned photoresist layer. The composition may also be directly deposited and patterned into permanent metal oxide device features by a photolithographic process.


Dynamics Of Poly(Vinyl Acetate)-D₃ On Silica, Robert D. O'Connor, Frank D. Blum, Gu Xu Jan 2001

Dynamics Of Poly(Vinyl Acetate)-D₃ On Silica, Robert D. O'Connor, Frank D. Blum, Gu Xu

Mechanical and Aerospace Engineering Faculty Research & Creative Works

Poly(vinyl acetate) (PVAc) is an important polymer in applications because of both its bulk and surface characteristics. Its chain architecture gives it a low Tg and, generally, good qualities for processing and applications, which include paints, adhesives, thin films and surface coatings. In this study, we investigate the surface dynamics of PVAc absorbed onto silica with deuterium nuclear magnetic resonance (2H NMR). For dynamics studies, 2H NMR is an excellent technique because it uses an innocuous probe that can report on correlation times (τc) from approximately 10-8 s to 10 s. We report the use of two-dimensional exchange NMR (2D-X) …


Dynamics Of Polyacrylates In Concentrated Chloroform Solutions, Frank D. Blum, Raj B. Durairaj Jan 2001

Dynamics Of Polyacrylates In Concentrated Chloroform Solutions, Frank D. Blum, Raj B. Durairaj

Chemistry Faculty Research & Creative Works

The dynamics of polymers in polymer solutions have not been probed in great enough detail to provide a coherent picture of the behavior of these polymers, especially in more concentrated solutions. To help understand this behavior further, we have prepared a series of backbone-labeled polymers including poly(n-butyl acrylate)-d1 (PNBA). These provide a basis for comparison of the behavior among a group of related polymers. The dynamics have been probed by using deuterium relaxation times. Since the relaxation times are relatively fast and the quadrupolar relaxation mechanism is well understood, data from this technique provide a convenient means for comparison of …


Glass Transition Behavior Of Pmma Thin Films, Moses T. Kabomo, Frank D. Blum Jan 2001

Glass Transition Behavior Of Pmma Thin Films, Moses T. Kabomo, Frank D. Blum

Chemistry Faculty Research & Creative Works

In the last decade there has been an increased interest in the study of the properties of supported thin polymer films. This has been prompted by the incorporation of thin films into device applications and many other technologies. Although not without controversy, a large body of experimental work indicates departures from bulk behavior by thin films. Strong evidence from both theoretical and experimental work shows that the interaction of polymer with a substrate alters the polymer conformation and mobility. A variety of techniques has been employed to probe the mobility of thin supported polymer films. Some of these techniques indirectly …


Graduated Segmental Mobility In Polymer Layers On Silica, Frank D. Blum, Crystal E. Porter, Wuu-Yung Lin Jan 2001

Graduated Segmental Mobility In Polymer Layers On Silica, Frank D. Blum, Crystal E. Porter, Wuu-Yung Lin

Chemistry Faculty Research & Creative Works

The behavior of thin polymer layers on oxide substrates has gotten a great deal of attention as the size of materials, and hence polymer films, has gotten smaller. Indeed, the properties of adsorbed polymers are such that they can be different from those of bulk polymers, especially when the films are very thin. A wide variety of studies have been made on adsorbed polymers and sometimes the results seem contradictory. One of the properties often measured in thin films is the apparent glasstransition temperature, Tg. In principle, many techniques are sensitive to phenomenological changes occurring around Tg and, therefore, can …


Thermal Analysis Of Ultrathin Ps-R-Pmma Copolymer Films On Silica, Bing Zhang, Frank D. Blum Jan 2001

Thermal Analysis Of Ultrathin Ps-R-Pmma Copolymer Films On Silica, Bing Zhang, Frank D. Blum

Chemistry Faculty Research & Creative Works

Composite materials represent a major part of man-made materials that are used in many applications. The interaction of polymers with surfaces plays a crucial role in the final properties of these materials and, by understanding the surface processes and adsorption mechanisms, better systems can be designed. Therefore, the behavior of polymer molecules at interfaces has been the topic of many studies in recent years and a rough picture has been obtained. Keddie et al. Obtained experimental results showing the dependence of the glass transition temperature (Tg) on the thickness of supported polystyrene films using ellipsometry. Later, they also investigated supported …