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Electrodeposition Of Nickel-Copper Alloys And Nickel-Copper-Alumina Nanocomposites Into Deep Recesses For Mems, Amrit Panda

LSU Doctoral Dissertations

Electrodeposition is an important component in the fabrication of micro electro mechanical systems (MEMS). Nickel is the most commonly used material to produce three dimensional microstructures and few material alternatives have been demonstrated. In this dissertation, electrodeposited Ni-Cu alloys and nanocomposites are investigated as possible replacements for nickel in microsystems. Ni-Cu alloys are attractive for their corrosion resistance, magnetic and thermophysical properties. Alumina nanoparticulates included into metal matrices improve hardness and tribology of deposits. The Ni-Cu alloys and Ni-Cu-g-Al2O3 nanocomposites were electrodeposited from a citrate electrolyte, both at low and high pH. Electrodeposition experiments were performed in recessed microelectrodes 500 …