Open Access. Powered by Scholars. Published by Universities.®

Engineering Commons

Open Access. Powered by Scholars. Published by Universities.®

Chemical Engineering

PDF

University of Kentucky

Chemical and Materials Engineering Faculty Publications

Atomic layer deposition

Publication Year

Articles 1 - 2 of 2

Full-Text Articles in Engineering

Chemically Stable Artificial Sei For Li-Ion Battery Electrodes, Qinglin Zhang, Lei Han, Jie Pan, Zhi Chen, Yang-Tse Cheng Mar 2017

Chemically Stable Artificial Sei For Li-Ion Battery Electrodes, Qinglin Zhang, Lei Han, Jie Pan, Zhi Chen, Yang-Tse Cheng

Chemical and Materials Engineering Faculty Publications

The importance of coating's chemical stability in lithium-ion batteries has been demonstrated by this study. It is well known that the mechanical properties determine the cycle life, and chemical stability or chemical degradation rate determines the calendar life. In this study, we used HfO2 coatings prepared by atomic layer deposition as an example to show the chemical stability of the coatings for lithium ion battery electrodes.


A Non-Destructive Method For Measuring The Mechanical Properties Of Ultrathin Films Prepared By Atomic Layer Deposition, Qinglin Zhang, Xingcheng Xiao, Yang-Tse Cheng, Mark W. Verbrugge Aug 2014

A Non-Destructive Method For Measuring The Mechanical Properties Of Ultrathin Films Prepared By Atomic Layer Deposition, Qinglin Zhang, Xingcheng Xiao, Yang-Tse Cheng, Mark W. Verbrugge

Chemical and Materials Engineering Faculty Publications

The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al2O3 films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple …