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Design And Implementation Of A Z-Axis Mems Gyroscope With A Symmetric Multiple-Mass Mechanical Structure, Yujie Zhang
Design And Implementation Of A Z-Axis Mems Gyroscope With A Symmetric Multiple-Mass Mechanical Structure, Yujie Zhang
Mechanical & Aerospace Engineering Theses & Dissertations
This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mass design prioritizes the sense-mode Quality Factor (Q) and thus improves its scale factor. The proposed mechanically coupled, dynamically balanced anti-phase sense-mode design minimizes energy dissipation through the substrate in order to maximize the Q. Numerical simulation is implemented in a finite element analysis software, COMSOL, to identify the two operation modes of the gyroscope: drive-mode and sense-mode. The multiple-mass gyroscope design is further fabricated using a one-mask process. Experimental characterization of frequency response in both drive-mode and sense-mode of the device are conducted, proving the design …