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Process Development For The Fabrication Of Semiconductor Devices And Circuits Using Spin-On Dopant, Richard R. Ryan

UNLV Theses, Dissertations, Professional Papers, and Capstones

Traditional approaches to semiconductor device fabrication are expensive and time consuming, making them out of reach for most universities and colleges. The objective of this thesis is to develop a process by which semiconductor devices and circuits can be implemented completely in-house using spin-on dopants (SODs), and low-cost transparency masks, to significantly reduce the lead time, complexity, and cost associated with device fabrication. This will allow hands on fabrication experience for students at universities and colleges without the traditional expensive device fabrication facilities. In addition, it will also allow students and professors to design, fabricate and test semiconductor devices and …