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Multi-Wavelength Infrared Imaging Computer Systems And Applications, Jun Li

Dissertations

This dissertation presents the development of three computer systems for multi-wavelength thermal imaging.

Two computer systems were developed for the multi-wavelength imaging pyrometers (M-WIPs) that yield non-contact temperature measurements by remotely sensing the surface of objects with unknown wavelength-dependent emissivity. These M-WIP computer systems represent the state-of-art development in remote temperature measurement system based on the multi-wavelength approach. The dissertation research includes M-WIP computer system integration, software development, performance evaluation, and also applications in monitoring and control of temperature distribution of silicon wafers in a rapid thermal process system.

The two M-WIPs are capable of data acquisition, signal processing, system …