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Method For Fabricating Or Modifying An Article Comprising The Removal Of A Polymer Coating, Bonnie Bachman, Elizabeth A. Hofstatter, Joan M. Ritter, Jerry J. Rubin

Economics Faculty Research & Creative Works

Disclosed is a method for removing poly-para-xylylene, its derivatives, and copolymers (collectively called "parylene") from bodies, including relatively large bodies such as printed circuit (PC) boards, that is capable of yielding relatively high removal rates. A body such as a PC board coated with parylene is placed into a reaction chamber downstream from a microwave plasma such that plasma discharge products generated by the microwave plasma react with the parylene, etching the parylene without exposing the body to bombardment by energetic ions and/or electrons. The plasma is generated from a gas mixture containing oxygen, a second gas, and optional additives …