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Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola
Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola
Journal of the Microelectronic Engineering Conference
From Merriam-Webster dictionary, it states that peristalsis can best be described as "successive waves of involuntary contraction passing along the walls of a hollow muscular structure (such as the esophagus or intestine) and forcing the contents on- ward"[1]. The objective of this project was to create a peristaltic micropump at the Rochester Institute of Technology (RIT) Semiconductor and Microsystem Fabrication Laboratory (SMFL). Using Micro-Electro-Mechanical Systems (MEMS) to create a peristaltic pump to lower the energy used to move a uid through a tube. Using three single micro- machined micro-pumps in a straight line to create this type of action. Fabrication …
Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang
Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang
Journal of the Microelectronic Engineering Conference
This paper focuses on the design and fabrication of a surface MEMS three-axis accelerometer with comb-drive fingers that measures acceleration up to 10G in the x/y-direction, and 5G in the z-direction on a single device using capacitve sensing. The fabrication process was performed in the Semiconductor and Microsystems Laboratory (SMFL), with a 7 level process flow to achieve the desired features. The accelerometer was designed to have a movable top electrode with sensing fingers attached to it to sense the change in capacitance the x/y-direction and a bottom electrode to sense the change in z-direction. The paper will focus on …